Low Friction Carbide-Derived Carbon Coating on SiC in Vacuum Achieved by Microstructure Formulation and Solid–Liquid Lubrication
Low Friction Carbide-Derived Carbon Coating on SiC in Vacuum Achieved by Microstructure Formulation and Solid–Liquid Lubrication
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通过微结构配方和固液润滑在真空下在 SiC 上实现低摩擦碳化物衍生碳涂层
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
Jin
中科院分区：
文献类型：
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作者：
Fuyan Liu;Hui Guo;Wen;J. Sui;Le Sun;Junhu Meng;Qihua Wang;Jin
在5 vol.% Cl2-Ar气体中，在1000℃下氯化，制备了两种SiC衬底上具有凹窝结构（CDC@GSiC涂层）和松散分散颗粒结构（CDC@RBSiC涂层）的碳化物衍生碳（CDC）涂层。微观结构效应使得两种CDC涂层在常压和真空条件下表现出不同的摩擦行为。对于CDC@RBSiC涂层，摩擦系数在环境压力下为0.08 ~ 0.12，在环境压力至103 Pa时，摩擦系数敏感，在压力为10−4 Pa时，摩擦系数高达0.42。在10−3 Pa范围内，渐进式抽真空不会改变CDC@GSiC涂层的摩擦系数。CDC@GSiC涂层的最大磨损深度为8 μm，磨损程度远低于CDC@RBSiC涂层（70 μm）。表面的凹陷和CDC@GSiC涂层中的孔隙是离子液体（IL）的储层，IL浸渍CDC@GSiC涂层在环境压力和真空条件下都表现出非常低的摩擦和磨损。
Carbide-derived carbon (CDC) coatings with dimple (CDC@GSiC coating) and loosely dispersive particles structures (CDC@RBSiC coating) were prepared on two kinds of SiC substrates by using chlorination at 1,000 °C in a 5 vol.% Cl2–Ar gas. Microstructural effect makes the two CDC coatings exhibit different frictional behavior in ambient pressure and in vacuum. For the CDC@RBSiC coating, the friction coefficient was from 0.08 to 0.12 at ambient pressure and is sensitive to evacuation from ambient pressure to 103 Pa while it was as high as 0.42 up to a pressure of 10−4 Pa. Progressive evacuation does not vary the friction coefficient of the CDC@GSiC coating up to 10−3 Pa. The wear of the CDC@GSiC coating was low with a maximum depth of 8 μm and much lower than that of the CDC@RBSiC coating (70 μm). The dimples on the surface and pores in the CDC@GSiC coating are reservoirs for ion liquid (IL), and the IL impregnated CDC@GSiC coating shows very low friction and wear at ambient pressure and in vacuum.