Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances
Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances
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DOI：
10.1007/s00542-011-1315-x
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发表时间：
2011-08-01
影响因子：
2.1
通讯作者：
Bazaz, Shafaat A.
中科院分区：
文献类型：
--
作者：
Saleem, M. Mubasher;Bazaz, Shafaat A.
本文设计了一种结构去耦的三自由度非谐振MEMS陀螺仪，增强了其鲁棒性和增益。本设计利用二自由度驱动模式振荡器的动态放大来实现大增益。考虑到20 μ m结构层厚度的标准电镀镍微加工工艺MetalMUMPs的制造限制，通过行为模型仿真验证了器件的性能。在低驱动电压下，实现了1.74 kHz的宽工作带宽，再动态放大0.2 μ m。进行了设计灵敏度和蒙特卡罗分析，以证明在制造过程公差范围内，没有任何反馈控制的设计的鲁棒性。此外，为了验证器件在角速度作用下的性能，进行了速率表表征，在驱动电压为20 V-ac和30 V-dc，角速度为50 rad/s时，旋转诱导的科里奥利力对应的传感质量位移为30 nm。事实证明，行为模型仿真是传统迭代制造和物理层模拟的一种经济、省时的替代方法。
This paper presents design of a structurally decoupled 3-DoF non-resonant MEMS gyroscope with increased robustness and gain. The proposed design utilizes dynamic amplification in 2-DoF drive mode oscillator to achieve large gain. The device performance is verified through behavioral model simulations considering the fabrication limitations of standard electroplated nickel micromachining process, MetalMUMPs, of 20 mu m structural layer thickness. A wide operational bandwidth of 1.74 kHz with dynamically amplified again of 0.2 mu m is achieved at low actuation voltages. A design sensitivity and Monte Carlo analysis is carried out to show the robustness of the design, without any feedback control, within the fabrication process tolerances. Moreover to verify the device performance under the application of angular velocity, a rate table characterization is carried out which resulted in sense mass displacement of 30 nm corresponding to the rotation induced Coriolis force at actuation voltage of 20 V-ac and 30 V-dc with angular rotation of 50 rad/s. Behavioral model simulations proved to be an cost-effective and time-saving alternative to the traditional iterative fabrications and physical level simulations.