Novel Bulk acoustic wave resonator structure for reducing electrical loss of electrodes
Novel Bulk acoustic wave resonator structure for reducing electrical loss of electrodes
复制标题
用于减少电极电损耗的新型体声波谐振器结构
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
Duck
中科院分区：
文献类型：
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作者：
Ho;I. Song;Moon;Jea;Sang Uk Son;Chul;Jing Cui;Ai Yujie;Duck
体声波（BAW）谐振器是移动的设备的RF滤波器和滤波器中的重要部件。BAW谐振器由夹在顶部电极和底部电极之间的压电层组成。本文提出了一种新型体声波谐振器结构，以减少电极的电损耗，从而降低插入损耗，这对于实现低损耗RF滤波器和滤波器具有重要意义。为此，谐振器被设计为在其周边上具有12 μ m宽和2 μ m高的金带，其中一半区域分别连接到周边附近的顶部电极和另一半底部电极。结果表明，谐振器在谐振频率处的插入损耗从-0.05dB降到-0.03dB。Q值和电极电阻也分别从995提高到1360和1.07Ω提高到0.81Ω。
A Bulk acoustic wave (BAW) resonator is an essential component in the RF filter and duplexer of mobile devices. The BAW resonator consists of a piezoelectric layer sandwiched between a top electrode and a bottom electrode. In this paper, a novel BAW resonator structure is presented to reduce the electrical loss of electrodes and thereby lower insertion loss which is important to achieve low loss RF filter and duplexer. For that, the resonator is designed to have a gold band of 12 um wide and 2 um high on its perimeter in which half region is connected to the top electrode and the other half the bottom electrode near the perimeter, respectively. As results, insertion loss of the resonator is reduced from -0.05dB to -0.03dB at resonance frequency. Q-factor and electrode resistance are also improved from 995 to 1360 and 1.07Ω to 0.81Ω, respectively.