Vertically coupled microring resonators using polymer wafer bonding
Vertically coupled microring resonators using polymer wafer bonding
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DOI：
10.1109/68.903217
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发表时间：
2001-01-01
影响因子：
2.6
通讯作者：
Ho, PT
中科院分区：
文献类型：
--
作者：
Absil, PP;Hryniewicz, JV;Ho, PT
提出了一种新的制作垂直耦合半导体微腔的技术，该技术简化了制作过程，器件对环-波导失调的鲁棒性更强。在这种结构中，第一次演示了单模微腔光信道分出滤波器，其es大于3000，谐振信道消光大于12 dB，还制作了具有二阶微环的1 × 4多路复用器/解复用器交叉杆阵列，其通道间串扰低于10 dB。
A new technique is presented to make vertically coupled semiconductor microring resonators that eases the fabrication process with devices more robust to ring-to-waveguide misalignments, Single-mode microring optical channel dropping filters are demonstrated for the first time in this configuration with es greater than 3000 and an on-resonance channel extinction greater than 12 dB, A 1 x 4 multipiexer/demultiplexer crossbar array with second-order microrings was also made and exhibited channel-to-channel crosstalk lower than 10 dB.