Phase composition and tribological performance of molybdenum nitride coatings synthesized by IBAD
Phase composition and tribological performance of molybdenum nitride coatings synthesized by IBAD
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DOI：
10.1016/j.surfcoat.2012.06.032
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发表时间：
2013-08
影响因子：
5.4
通讯作者：
Xiaodong Zhu;Di Yue;C. Shang;M. Fan;B. Hou
中科院分区：
文献类型：
--
作者：
Xiaodong Zhu;Di Yue;C. Shang;M. Fan;B. Hou
通过离子束辅助沉积（IBAD）合成氮化钼涂层。研究了氮分压和轰击离子能量对相形成的影响。研究了涂层在不同环境下的摩擦系数和耐磨性能。氮化钼相中氮与钼的化学计量比随着氮分压的增加而增大，较高的轰击离子能量有利于形成单一的MoN相。通过控制氮/氩的比例和离子能量可以制备Mo2N、MoN或两相的混合物。 MoN涂层的硬度、摩擦系数、耐磨性和抗氧化性均优于Mo2N涂层。随着试验温度的升高，摩擦系数降低，但耐磨性降低。非氧化气氛中摩擦力的变化与露天相反，表明MoN在高温下的低摩擦力取决于氧化。在所有测试条件下，氧化退火形成的MoO3相的摩擦学性能均表现出比沉积态MoN高得多的摩擦系数，并且缺氧氧化物被认为是润滑相。
Molybdenum nitride coatings were synthesized by ion-beam-assisted-deposition (IBAD). The effects of nitrogen partial pressure and bombarding ion energy on the phase formation were investigated. The coefficient of friction and wear resistance of the coatings in different environments were studied. The stoichiometric ratio of nitrogen to Mo of the molybdenum nitride phases increases with the nitrogen partial pressure, and higher bombarding ion energy was helpful to form single MoN phase. Mo2N, MoN or mixture of the two phases could be prepared by controlling of the ratio of nitrogen/argon and ion energy. The hardness, coefficient of friction, wear and oxidation resistance of MoN were superior to that of Mo2N coating. The coefficient of friction decreased with the increase of testing temperature, yet the wear resistance became lower. The change of friction in non-oxidation atmosphere was reversed to that in the open air, indicating that the low friction of MoN at elevated temperature depends on oxidation. The tribological performance of the MoO3phase formed by oxidation annealing showed much higher coefficient of friction than that of as-deposited MoN in all the testing conditions, and the oxygen deficient oxides were implied to be the lubricious phases.