Effect of piezoelectric layer thickness and poling conditions on the performance of cantilever piezoelectric energy harvesters on Ni foils
Effect of piezoelectric layer thickness and poling conditions on the performance of cantilever piezoelectric energy harvesters on Ni foils
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DOI：
10.1016/j.sna.2018.02.019
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发表时间：
2018-04
影响因子：
4.6
通讯作者：
H. Yeo;S. Trolier-McKinstry
中科院分区：
文献类型：
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作者：
H. Yeo;S. Trolier-McKinstry
利用在柔性镍箔上生长的锆钛酸铅（PZT）薄膜，研究了薄膜厚度和极化条件对机械能采集器性能的影响。在Ni箔上制备的1 μ m厚的Mn掺杂PZT（52/48）（001）取向薄膜的介电常数和介电常数随Mn掺杂量的增加而增加。|e 31，f|在10 kHz和11.3C/m2下，热极化后的电阻率分别为390。该膜具有约0.4C2/m4的大的品质因数（e31，f2 ε r），用于压电能量收集。单压电晶片悬臂梁很容易制作从PZT薄膜上的Ni箔，使用简单的机械切割。在0.5G的谐振频率（~ 70 Hz）下，随着Nb掺杂PZT薄膜厚度从1 μ m增加到3 μ m，最大输出功率从12 μW增加到60 μW。最佳极化条件（150° C，3倍矫顽场下极化15 min）提高了在Ni箔上制备的（1 μm）PZT膜的电压和功率输出。有人发现，收割机的功率性能强烈地依赖于膜的厚度与谐振收割机相同的足迹面积（0.385厘米2），使用PZT薄膜Ni箔。
Lead zirconate titanate (PZT) films grown on flexible Ni foils were utilized to explore the effects of thickness and poling conditions on the performance of mechanical energy harvesters. In the case of Mn doped 1 μ m thick (001) oriented sol-gel PZT (52/48) films on Ni foil, the dielectric constant and| e 31, f| are 390 at 10 kHz and 11.3 C/m 2, respectively, after hot poling. This film has a large figure of merit (e 31, f 2 ε r), of around 0.4 C 2/m 4, for piezoelectric energy harvesting. Unimorph cantilever beams were easily fabricated from PZT films on Ni foil using simple mechanical cutting. The maximum power increases from 12 to 60 μW as the thickness of Nb doped PZT film increases from 1 to 3 μ m at resonance frequency (∼ 70 Hz) at 0.5 G. The optimum poling condition (150° C, at 3 times the coercive for 15 min) enhanced the voltage and power output of the cantilever harvester prepared using (1 μm) PZT films on Ni foil. It was found that the power performance of harvesters strongly depends on the thickness of the film with resonant harvesters of the same footprint area (0.385 cm 2) using PZT films on Ni foils.