Diffusion barrier layer
Diffusion barrier layer
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扩散阻挡层
DOI：
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发表时间：
1999
期刊：
影响因子：
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通讯作者：
E. M. Moser
中科院分区：
文献类型：
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作者：
E. M. Moser
本发明涉及一种应用于基板(44)的有机扩散阻挡层(58)。所述阻挡层具有非极性骨架结构和对挥发性气体、蒸汽和液体的高阻隔效应。扩散阻挡层(58)由通过等离子体聚合产生的碳氢聚合物组成。它分别含有氧、氮、氟、溴、硼和硅中的至少一种元素的0.01-6at%，从而所述元素的总量不超过12at%。通过至少一个脉冲或连续直流磁控溅射源等离子体(26)或通过感应激励、脉冲或连续微波放电(20)来产生扩散阻挡层(58)的阻挡效应。
The invention relates to an organic diffusion barrier layer (58) applied to a substrate (44). Said barrier layer has an apolar skeletal structure and a high barrier effect with respect to volatile gases, vapours and liquids. The diffusion barrier layer (58) consists of a hydrocarbon polymer that is produced by means of plasma polymerization. It respectively contains 0.01-6 at % of at least one element from the group consisting of oxygen, nitrogen, fluorine, bromine, boron and silicon, whereby the total amount of said elements does not exceed 12 at %. The barrier effect of the diffusion barrier layer (58) is produced by means of at least one pulsed or continuous DC magnetron sputtering source plasma (26) or by means of inductively excited, pulsed or continuous microwave discharge (20).