Optical sensing of flammable substances using porous silicon microcavities

Optical sensing of flammable substances using porous silicon microcavities
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DOI:
10.1016/s0921-5107(03)00114-4
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发表时间:
2003-07-25
期刊:
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
影响因子:
--
通讯作者:
Rossi, AM
Rossi, AM
中科院分区:
其他
文献类型:
--
作者:
De Stefano, L;Rendina, I;Rossi, AM

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多孔硅多层膜,由两个分布式布拉格反射器之间的法布里-珀罗腔构成,暴露于几种有机物质的蒸汽。不同的共振峰位移的反射率光谱,归因于毛细管冷凝的蒸汽在硅孔,已被观察到。从实验数据出发,数值估算了传感叠层中凝结的层液体积分数。值范围在0.27(乙醇)和0.33(异丙醇)之间。时间分辨测量表明,溶剂识别发生在不到10 s。(C)2003 Elsevier Science B. V.保留所有权利。
A porous silicon multilayer, constituted by a Fabry-Perot cavity between two distributed Bragg reflectors, is exposed to vapor of several organic species. Different resonant peak shifts in the reflectivity spectra, ascribed to capillary condensation of the vapor in the silicon pores, have been observed. Starting from experimental data, the layer liquid volume fractions condensed in the sensing stack have been numerically estimated. Values ranging between 0.27 (for ethanol) and 0.33 (for iso-propanol) have been found. Time-resolved measurements show that the solvent identification occurs in less then 10 s. (C) 2003 Elsevier Science B.V. All rights reserved.