Optical sensing of flammable substances using porous silicon microcavities
Optical sensing of flammable substances using porous silicon microcavities
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DOI:
10.1016/s0921-5107(03)00114-4
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发表时间:
2003-07-25
期刊:
影响因子:
--
通讯作者:
Rossi, AM
中科院分区:
文献类型:
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作者:
De Stefano, L;Rendina, I;Rossi, AM
A porous silicon multilayer, constituted by a Fabry-Perot cavity between two distributed Bragg reflectors, is exposed to vapor of several organic species. Different resonant peak shifts in the reflectivity spectra, ascribed to capillary condensation of the vapor in the silicon pores, have been observed. Starting from experimental data, the layer liquid volume fractions condensed in the sensing stack have been numerically estimated. Values ranging between 0.27 (for ethanol) and 0.33 (for iso-propanol) have been found. Time-resolved measurements show that the solvent identification occurs in less then 10 s. (C) 2003 Elsevier Science B.V. All rights reserved.