Influence of deposition pressure on the structural, optical and electrical properties of Sb2Se3 thin films grown by RF magnetron sputtering
Influence of deposition pressure on the structural, optical and electrical properties of Sb2Se3 thin films grown by RF magnetron sputtering
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沉积压力对射频磁控溅射Sb2Se3薄膜结构、光学和电学性能的影响
DOI:
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发表时间:
2019
影响因子:
0.5
通讯作者:
Chu Junhao
中科院分区:
文献类型:
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作者:
Zhao Fei;Tao Jiahua;Guo Yixin;Ma Chuanhe;Jiang Jinchun;Chu Junhao