Nanoimprinting of Refractive Index: Patterning Subwavelength Effective Media for Flat Optics

Nanoimprinting of Refractive Index: Patterning Subwavelength Effective Media for Flat Optics
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折射率纳米压印:平面光学的亚波长有效介质图案化

DOI:
10.1021/acsanm.0c01395
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发表时间:
2020
影响因子:
5.9
通讯作者:
Ryckman, Judson D.
Ryckman, Judson D.
中科院分区:
材料科学2区
文献类型:
--
作者:
Talukdar, Tahmid H.;Perez, Julius C.;Ryckman, Judson D.

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亚波长有效介质为定制芯片表面的光学特性提供了强大的工具,但由于其对纳米级特征的需求,在光频率下实现仍然具有挑战性。为了应对这一挑战,引入了一种简单的两步方法,用于在芯片表面上图案化折射率。该过程被称为“折射率纳米压印”(NIRI),依赖于高孔隙率介孔硅薄膜的直接纳米压印和塑性变形。这表明可以在 Δn≈ 1 RIU 范围内实现非常宽且可图案化的折射率调整。对薄膜压缩的有效介质响应的研究表明,只有在考虑了纳米级天然氧化物的贡献之后,才与有效介质理论非常一致。 NIRI开辟了利用亚波长自由度的新途径,并为实现高性能和低成本平面光学提供了前景。
Subwavelength effective media offer a powerful tool for tailoring optical properties on the surface of a chip but remain challenging to realize at optical frequencies owing to their demand for nanoscale features. To meet this challenge, a simple two-step method for patterning refractive index on the surface of a chip is introduced. The process is referred to as “nanoimprinting of refractive index” (NIRI) and relies on the direct nanoimprinting and plastic deformation of high-porosity mesoporous silicon thin films. This is shown to enable very wide and patternable tuning of refractive index over a range Δn≈ 1 RIU. Investigation of the effective medium response to film compression reveals close agreement to effective medium theory only after factoring in the contribution from the nanoscaled native oxide. NIRI opens a new route for harnessing the subwavelength degree of freedom and offers the prospect of realizing high-performance and low-cost flat optics.
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