Vacuum Ultraviolet-Assisted Sol-Gel Processing of Zn, Sn, Zn-Sn Oxide Thin Films for OLED Encapsulation
Vacuum Ultraviolet-Assisted Sol-Gel Processing of Zn, Sn, Zn-Sn Oxide Thin Films for OLED Encapsulation
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用于 OLED 封装的 Zn、Sn、Zn-Sn 氧化物薄膜的真空紫外辅助溶胶-凝胶加工
DOI：
10.1149/08801.0399ecst
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发表时间：
2018
期刊：
影响因子：
--
通讯作者：
Suzuri Yoshiyuki
中科院分区：
文献类型：
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作者：
Sun Lina;Kurosawa Yu;Yoshida Tsukasa;Suzuri Yoshiyuki
采用真空紫外光（VUV）照射下金属有机前驱体的光化学分解，实现了ZnO、SnO 2和Zn-Sn氧化物的高度致密玻璃状薄膜的室温溶液处理，以将其用作柔性薄膜有机发光二极管（OLED）的薄膜封装（TFE）。必须注意控制涂料溶液中的水量，因为前体化合物中的水合水已经对促进粒状晶体生长产生了强烈的影响。用无水前驱体，可以获得高度平坦的薄膜，没有针孔和裂纹。红外光谱和椭圆偏振光谱分析表明，有机配体在5分钟内快速分解并缩聚成高密度的金属氧化物薄膜。TEM观察实际上揭示了结晶成约5 nm尺寸的ZnO，尽管该反应是在不存在水且在N2下进行的。由于该工艺不需要高温、O2条件和H2O来损害OLED器件，因此这些金属氧化物可以作为TFE应用于OLED以延长其寿命3-4倍。
Room temperature solution processing of highly compact, glasslike thin films of ZnO, SnO2 and Zn-Sn oxide was achieved for the purpose to use them as thin film encapsulation (TFE) for flexible film organic light emitting diodes (OLEDs), by employing photochemical decomposition of metalorganic precursors under vacuum ultraviolet (VUV) irradiation. Care had to be taken to control the amount of water in the coating solution since hydration water in the precursor compound already gave a strong influence to promote granular crystal growth. With anhydrous precursors, highly flat thin films without pinholes and cracks could be obtained. The analysis by FTIR and ellipsometry revealed fast decomposition of organic ligand and polycondensation to metal oxide thin films with high densities within 5 minutes. TEM observation in fact revealed crystallization into ZnO in about 5 nm size, despite the reaction was carried out in the absence of water and under N2. Since the process does not require a high temperature, O2 condition and H2O to harm OLED devices, these metal oxides could be applied to OLEDs as TFEs to extend their lifetime for 3-4 times.