High-lateral-resolution scanning deflectometric profiler using a commercially available autocollimator
High-lateral-resolution scanning deflectometric profiler using a commercially available autocollimator
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DOI：
10.1088/0957-0233/25/9/095202
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发表时间：
2014-07
影响因子：
2.4
通讯作者：
Y. Bitou;Y. Kondo
中科院分区：
文献类型：
--
作者：
Y. Bitou;Y. Kondo
通过引入一种新颖的零位仪，提高了使用市售自准直仪的角基偏折表面轮廓仪的横向分辨率。所提出的零点仪器是简单的，廉价的，并具有较短的响应时间。使用光斑尺寸为1 mm的激光束成功地实现了低反射表面的高精度平面度测量。表面轮廓测量的重复性优于±0.6 nm。
The lateral resolution of the angle-based deflectometric surface profiler using a commercially available autocollimator has been improved by introducing a novel null instrument. The proposed null instrument is simple, inexpensive, and has a short response time. High-accuracy flatness measurements of low-reflective surfaces have been successfully demonstrated using a laser beam with a spot size of 1 mm. The repeatability of the surface profile measurement is better than ±0.6 nm.