Quality factor tuning of micromechanical resonators via electrical dissipation
Quality factor tuning of micromechanical resonators via electrical dissipation
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DOI：
10.1063/1.5125286
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发表时间：
2020-01
影响因子：
4
通讯作者：
N. Bousse;J. M. Miller;Hyun-Keun Kwon;G. Vukasin;T. Kenny
中科院分区：
文献类型：
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作者：
N. Bousse;J. M. Miller;Hyun-Keun Kwon;G. Vukasin;T. Kenny
微机械谐振器的灵敏电容转换会导致显著的电耗散，从而降低本征模的品质因数。我们从理论上和实验上证明了一个方案，用于隔离的机械谐振器由于欧姆耗散读出放大器的电阻尼。由放大器引起的品质因数抑制强烈地依赖于放大器反馈电阻和寄生电容。通过研究双固支微机械梁的热机械位移噪声谱，我们证实了电耗散调谐实际的，而不是有效的，品质因数。电容式位移传感器是谐振式传感器和振荡器的关键部件，在设计电容式位移传感器时，电损耗是一个重要的考虑因素。
Sensitive capacitive transduction of micromechanical resonators can contribute significant electrical dissipation, which degrades the quality factor of the eigenmodes. We theoretically and experimentally demonstrate a scheme for isolating the electrical damping of a mechanical resonator due to Ohmic dissipation in the readout amplifier. The quality factor suppression arising from the amplifier is strongly dependent on the amplifier feedback resistance and parasitic capacitance. By studying the thermomechanical displacement noise spectrum of a doubly clamped micromechanical beam, we confirm that electrical dissipation tunes the actual, not effective, quality factor. Electrical dissipation is an important consideration in the design of sensitive capacitive displacement transducers, which are a key component in resonant sensors and oscillators.