Investigation of the influence of ultrasonic stirring on mass transfer in the through-mask electrochemical micromachining process
Investigation of the influence of ultrasonic stirring on mass transfer in the through-mask electrochemical micromachining process
复制标题
穿掩模电化学微加工过程中超声波搅拌对传质的影响研究
DOI：
10.1007/s11431-017-9156-1
复制
发表时间：
2018-02-01
影响因子：
4.6
通讯作者：
Li Yan
中科院分区：
文献类型：
--
作者：
Wang QuanDai;Cai XingXing;Li Yan
表面纹理化是一种被广泛接受的用于减少机械部件之间摩擦的方法。掩膜电化学微加工是一种用于金属表面纹理化的简单且可靠的工艺，其中传质条件对最终加工质量有深远影响。通常采用超声搅拌器来增强传质。然而，对超声搅拌对传质影响的理解是有限的，远不足以制定其实际应用的指导方针。在这项工作中，通过数值模拟和实验研究了超声搅拌参数对传质的影响。通过数值方法，获得了电解液中随时间的周期性压力变化，表明超声搅拌导致电解液流场中剧烈的瞬态压力变化。与超声频率、振幅以及阳极表面浸入电解液的深度相关的参数会影响压力幅值。进行了验证实验，并对蚀刻表面轮廓和形貌进行了表征，结果表明实验观察结果与数值预测相符。通过优化传质，在锡青铜基底上大规模展示了定义良好的30微米微坑阵列和光滑的蚀刻表面。
Surface texturing is a widely accepted approach for friction reduction between mechanical components. Through-mask electrochemical micromachining is a simple and reliable process for metal surface texturing in which mass transport conditions have profound influence on final machined quality. An ultrasonic stirrer is usually adopted for mass transfer enhancement. However, understanding of the effects of ultrasonic stirring on mass transfer is limited, and is far from sufficient for developing guidelines for its practical application. In this work, the influences of ultrasonic stirring parameters on mass transfer have been investigated numerically and experimentally. With the numerical method, periodic pressure change in the electrolyte over time has been obtained, showing that ultrasonic stirring results in drastic transient pressure change in electrolyte fluid fields. Parameters related to ultrasonic frequency, vibration amplitude, and the depth of anode surface immersed in the electrolyte solution influence pressure amplitude. Validation experiments have been conducted and etched surface profile and morphology characterized, which show that the experimental observations are in agreement with numerical predictions. With the optimized mass transfer, well-defined micro-pits array of 30 μm and a smooth etched surface on tin-bronze substrate in large scale have been demonstrated.