An improved method of preparing composite poly(dimethylsiloxane) moulds
An improved method of preparing composite poly(dimethylsiloxane) moulds
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DOI：
10.1088/0957-4484/17/1/032
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发表时间：
2006-01-14
期刊：
影响因子：
3.5
通讯作者：
Lee, HH
中科院分区：
文献类型：
--
作者：
Kang, H;Lee, J;Lee, HH
制备具有高密度图案、特征尺寸小于100nm且纵横比大于1的聚(二甲基硅氧烷)(PDMS)模具一直是一个尚未解决的挑战。提出了一种允许制备这种 PDMS 模具的方法。通过向混合物中引入适当选择的溶剂来降低PDMS预聚物混合物的粘度并增强润湿性，再加上使用过量的调节剂来延迟交联，是成功制备模具的关键。虽然该方法被证明对于深宽比为 1.5 的特征尺寸小至 40 nm 的密集图案有效，但它也可能被证明对于较小的特征尺寸也有效。
Preparing a poly (dimethylsiloxane) (PDMS) mould having a high density pattern with a feature size smaller than 100 nm and an aspect ratio larger than unity has been a challenge yet to be met. A method is presented that permits preparation of such a PDMS mould. Lowering the viscosity of PDMS prepolymer mixture and enhancing the wettability by introducing a properly chosen solvent to the mixture, coupled with the use of an excessive amount of modulator to delay cross-linking, is the key to Successfully preparing the mould. While the method is shown to be effective for dense patterns down to 40 nm feature size with an aspect ratio of 1.5, it might also prove to be effective for smaller feature sizes.