Outgassing Characteristics of Titanium with Surface Treatment of Oxidation
Outgassing Characteristics of Titanium with Surface Treatment of Oxidation
复制标题
钛表面氧化处理的放气特性
DOI：
10.3131/jvsj.45.665
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
Yoshio Saito
中科院分区：
文献类型：
--
作者：
Y. Morimoto;A. Takemura;Y. Muroo;M. Uota;Y. Sato;Yoshio Saito
为了研究钛的放气特性，用电导调制法对纯钛和钛合金进行了放气测量。在化学抛光或机械力化学抛光后，在Ar+O2气氛中对腔体表面进行200℃和450℃的氧化处理。在200℃氧化处理的纯钛室上测得抽气50小时后的最低放气率为5×10~(-9)帕·m~3·S~(-1)·m~(-2)，并对在相同条件下处理的试件进行了电子显微镜等表面分析。这些表面分析表明，200℃的氧化处理可以有效地获得钛的低放气表面，因为钛的氧化膜很薄，而且是无定形的。
For the purpose of investigating the outgassing characteristics of titanium, outgassing measurements by the conductance-modulation method for pure titanium and titanium alloy have been made. The surfaces of the chambers were treated with oxidation at 200°C and 450°C in an argon plus oxygen atmosphere after chemical polishing or mechanochemical buffing. The lowest outgassing rate of 5 × 10-9 Pa m3 s-1 m-2 after 50 hr pumping was measured on a pure titanium chamber by oxidation treatment at 200°C. Surface analyses such as TEM were also done on test samples treated in the same conditions as the chambers. Oxidation treatment at 200°C is effective to obtain a low outgassing surface for titanium because of its thin and amorphous oxide film, which was observed by these surface analyses.