A route to fabricate nanocontacts by X-ray lithography for the realization of single electron transistors and highly sensitive biosensors
A route to fabricate nanocontacts by X-ray lithography for the realization of single electron transistors and highly sensitive biosensors
复制标题
通过 X 射线光刻制造纳米接触的途径，用于实现单电子晶体管和高灵敏度生物传感器
DOI：
10.1016/j.matlet.2006.03.084
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发表时间：
2006
影响因子：
3
通讯作者：
M. Tormen
中科院分区：
文献类型：
--
作者：
S. Carrara;D. Ricci;E. Zitti;E. Fabrizio;M. Altissimo;M. Tormen
由于需要严格控制以获得适当的电极形状和尺寸，单电子晶体管和/或高灵敏度生物传感器的制造仍然是一项具有挑战性的任务。纳米尺寸的尖端和电极对之间几纳米的间隔是关键特征。由于分辨率限制，传统光刻不适合获得这些特征，因此之前的替代方法涉及使用电子束光刻、聚焦离子束光刻或扫描探针纳米光刻。这封信中提出的新颖方法是利用 Elettra 同步加速器中的 X 射线光刻来制造间隔几纳米的纳米接触阵列，致力于设计基于纳米粒子和/或单分子的新型纳米器件，包括单电子晶体管和高灵敏度生物传感器。说明并讨论了制造此类器件的方法。给出了制造过程的实验细节，并通过 SEM 和 AFM 图像呈现了初步结果。值得注意的是，本文提出了一种通过同步辐射源使用 X 射线光刻来生产纳米接触的可行方法，该方法尚未与实验（尽管是初步的）数据一起报道。
The fabrication of single electron transistors and/or highly sensitive biosensors is still a challenging task on account of the tight control required to get proper shapes and size of the electrodes. The nanosized tips and the separation of a few nanometers between electrode pairs are critical features. Conventional lithography is not suited to obtain these features because of the resolution limits, so that previous alternative approaches have involved the use of electron beam lithography, focused ion beam lithography or scanning probe nanolithography. The novel approach presented in this letter is the exploitation of X-ray lithography in the Elettra synchrotron to fabricate arrays of nanocontacts spaced a few nanometers, devoted to the design of a new class of nanodevices based on nanoparticles and/or single molecules, including single electron transistors and highly sensitive biosensors. The method to fabricate such devices is illustrated and discussed. Experimental details of the fabrication process are given and preliminary results are presented through SEM and AFM images. It is worth noting that this paper presents a viable method to produce nanocontacts by using the X-ray lithography by synchrotron radiation source, that has not yet been reported together with experimental, though preliminary, data.