Active Electrostatic Compensation of Micromechanical Resonators Under Random Vibrations
Active Electrostatic Compensation of Micromechanical Resonators Under Random Vibrations
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随机振动下微机械谐振器的主动静电补偿
DOI：
10.1109/jmems.2010.2067444
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发表时间：
2010
影响因子：
2.7
通讯作者：
T. Kenny
中科院分区：
文献类型：
--
作者：
S. Yoneoka;J. Salvia;G. Bahl;R. Melamud;S. Chandorkar;T. Kenny
本文提出了一种利用静电调谐来有效地减小微机械振荡器中由外部振动引起的相位噪声的方法。加速度计测量施加到微机械谐振器的加速度，并产生补偿信号，该补偿信号被添加到偏置电压以消除感应的相位误差。所提出的方法实现了80.6%的加速度灵敏度的平均减少为正弦加速度从50到250 Hz的单锚定双端音叉谐振器。由于随机振动在15至80 Hz的频带中的相位噪声的抑制也被证明。
This letter presents a method of using electrostatic tuning to actively diminish the phase noise in a micromechanical oscillator that is caused by external vibrations. An accelerometer measures the acceleration applied to a micromechanical resonator and generates a compensation signal that is added to the bias voltage to remove the induced phase error. The proposed method achieves an 80.6% reduction of the acceleration sensitivity on average for a sinusoidal acceleration from 50 to 250 Hz with single-anchored double-ended tuning fork resonators. The rejection of phase noise due to random vibrations in the band from 15 to 80 Hz is also demonstrated.