5 GHz Range SAW Filter Fabricated by Electron Beam Exposure with O2-Plasma Ashing Techniques
5 GHz Range SAW Filter Fabricated by Electron Beam Exposure with O2-Plasma Ashing Techniques
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采用 O2 等离子体灰化技术进行电子束曝光制造的 5 GHz 范围 SAW 滤波器
DOI：
10.7567/jjaps.25s1.154
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发表时间：
1986
期刊：
影响因子：
--
通讯作者：
Zhuohui Chen
中科院分区：
文献类型：
--
作者：
K. Yamanouchi;T. Meguro;Zhuohui Chen
在通信系统中需要GHz范围内的高性能滤波器。本文采用电子束光刻、常规剥离技术和O2等离子体清洗系统制备了0.187 μm量级的精细电极。这些技术已被应用到表面声波（SAW）滤波器在GHz范围内。我们在5 GHz的滤波器进行了实验。滤波器的最小插入损耗为15.0 dB的中心频率为5 GHz。我们还描述和展示了一些新的单相单向换能器（SPUDT）利用自对准角度蒸发技术，低损耗和无纹波。实验结果表明，在约500 MHz和10.0 dB在约2 GHz的方向性为18.0 dB/换能器。
High performance filters in the GHz range are required in communication systems. In this paper, fine electrodes of the order of 0.187 µm width have been fabricated using electron beam lithography, normal lift-off techniques and O2-plasma cleaning system. These techniques have been applied to surface acoustic wave (SAW) filters in the GHz range. We performed experiments with the filters at 5 GHz. Filters with minimum insertion loss of 15.0 dB at the center frequency of 5 GHz were obtained. We also describe and demonstrate some new single phase unidirectional transducers (SPUDT) utilizing self-aligned angle evaporation techniques with low loss and no ripples. The experimental results show a directivity of 18.0 dB/transducer at about 500 MHz and 10.0 dB at about 2 GHz.