Measurement of molar concentration spectra for nanoparticle with multi-modal nanoparticle size distribution using nanoparticle chip
Measurement of molar concentration spectra for nanoparticle with multi-modal nanoparticle size distribution using nanoparticle chip
复制标题
使用纳米颗粒芯片测量具有多峰纳米颗粒尺寸分布的纳米颗粒的摩尔浓度谱
DOI：
10.1016/j.precisioneng.2021.08.008
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发表时间：
2022
期刊：
影响因子：
--
通讯作者：
Syuhei Kurokawa
中科院分区：
文献类型：
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作者：
Jaqing Zhu;Terutake Hayashi;Syuhei Kurokawa
纳米粒子的粒度分布 (PSD) 分析对于化学机械抛光 (CMP) 工艺中使用的 CMP 浆料的质量管理非常重要。 CMP浆料含有多分散颗粒，其由悬浮中的尺寸不同的初级颗粒和次级颗粒组成。动态光散射是评估单分散颗粒PSD的典型方法之一，但很难测量多分散颗粒的PSD。图像分析也用于 PSD 分析。对于图像分析，需要在测量之前将颗粒从悬浮液转移到基底上。在此过程中，一些颗粒与周围的颗粒聚集。它导致悬浮液中分散颗粒的 PSD 与使用图像分析观察到的颗粒的 PSD 之间存在差异。此外，浓度测量对于CMP浆料的质量管理也很重要。质量浓度用于CMP浆料的浓度评估。然而，很难分别确定多峰粒子的摩尔浓度。在这项研究中，我们提出了一种定义摩尔浓度谱的方法，以表达多模态纳米粒子的模态直径和摩尔浓度，以评估 CMP 浆料。为了测量摩尔浓度光谱，我们提出了一种使用纳米颗粒芯片（NPC）的新型颗粒尺寸测量方法，以测量每个光谱的数量加权平均粒径、直径方差和摩尔浓度。基板上的纳米颗粒网格可维持悬浮液中的多分散状态以处理 NPC。 NPC可以协助图像分析过程来测量悬浮液中颗粒的PSD。可以对基板上排列的颗粒数量进行计数以测量摩尔浓度。本文进行了基础实验来研究摩尔浓度光谱测量的可行性。证实了使用 NPC 可以测量多分散颗粒的摩尔浓度谱，并认为具有摩尔浓度谱的 PSD 可以给出悬浮液中磨粒的详细信息，用于 CMP 浆料的质量管理。
Particle size distribution (PSD) analysis for nanoparticle is important for quality management of CMP slurry, that used in chemical mechanical polishing (CMP) process. CMP slurry contains poly-dispersed particles, which consist of size-different primary particles and secondary particles in suspension. It is difficult to measure PSD for poly-dispersed particle using Dynamic Light Scattering, which is one of a typical method to evaluate PSD for mono-dispersed particles. The image analysis is also employed for PSD analysis. For image analysis, it needs to transfer the particles from suspension to a substrate before measurement. In this procedure, some particles aggregate with surrounding particles. It causes the difference between the PSD for dispersed particles in suspension and the PSD for observed particle using image analysis. In addition, concentration measurement is important for quality management of CMP slurry. Mass concentration is used in concentration evaluation for CMP slurry. However, it is difficult to identify the molar concentration for multi-modal particles, respectively. In this study, we suggested a method to define molar concentration spectra to express both a modal diameter and molar concentration for multi-modal nanoparticles to evaluate the CMP slurry. In order to measure the molar concentration spectra, we suggested a novel particle sizing method using nanoparticle chip (NPC) to measure number-weighted mean particle diameter, a variance of diameters, and molar concentration for every spectrum. Nanoparticles grid on a substrate to maintain the poly-dispersed condition in suspension to process NPC. NPC can assist the image analysis process to measure the PSD of particles in suspension. The number of particles, that aligned on the substrate, can be counted to measure the molar concentration. In this paper, a fundamental experiment was performed to investigate the feasibility of molar concentration spectra measurement. It is confirmed the molar concentration spectra for poly-dispersed particles can be measured by using NPC and it is considered that PSD with molar concentration spectra can give detail information of abrasive grain in suspension for quality management of CMP slurry.