Large-core single-mode rib SU8 waveguide using solvent-assisted microcontact molding.
Large-core single-mode rib SU8 waveguide using solvent-assisted microcontact molding.
复制标题
DOI：
10.1364/ao.47.004540
复制
发表时间：
2008-09
期刊：
影响因子：
1.9
通讯作者：
Cheng-Sheng Huang;Wei-Chih Wang
中科院分区：
文献类型：
--
作者：
Cheng-Sheng Huang;Wei-Chih Wang
介绍了一种构建聚合物基大芯单模脊形光波导的新工艺。采用光学透过率高、机械性能稳定的负色调SU8光刻胶作为光波导材料。将聚二甲基硅氧烷模压技术与溶剂辅助微接触成型技术相结合，构建了一种光波导。研究了四种不同工艺条件对最终图案几何形状的影响。利用光束传播法软件进行光学模拟。在模拟波导和实际波导的输出端通过显微镜图像观察到单模光束的传输。
This paper describes a novel fabrication technique for constructing a polymer-based large-core single-mode rib waveguide. A negative tone SU8 photoresist with a high optical transmission over a large wavelength range and stable mechanical properties was used as a waveguide material. A waveguide was constructed by using a polydimethylsiloxane stamp combined with a solvent-assisted microcontact molding technique. The effects on the final pattern's geometry of four different process conditions were investigated. Optical simulations were performed using beam propagation method software. Single-mode beam propagation was observed at the output of the simulated waveguide as well as the actual waveguide through the microscope image.