High-frequency micromechanical columnar resonators
High-frequency micromechanical columnar resonators
复制标题
高频微机械柱状谐振器
DOI：
10.1088/1468-6996/10/3/034601
复制
发表时间：
2009
影响因子：
5.5
通讯作者：
E. Oesterschulze
中科院分区：
文献类型：
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作者：
J. Kehrbusch;E. A. Ilin;P. Boz̆ek;B. Radzio;E. Oesterschulze
采用一种简单而有效的工艺方案制备了高频硅柱状微谐振器。设计了一种优化的制备方案，得到了横向尺寸控制在1 μm以上的机械保护微柱。本文研究了环境条件对机械谐振器性能的影响。在环境条件下，我们观察到在几乎恒定温度下工作5小时的频率稳定性δf/f小于10−6。然而，改变温度会使频率变化大约−173 Hz°C−1。根据环境气体的粘性阻尼模型，我们发现第一弯曲模态的质量因子随压力的平方根的倒数而降低。然而，在低压状态下，观察到线性相关。我们还研究了浸入气体类型对谐振频率的影响。
Abstract High-frequency silicon columnar microresonators are fabricated using a simple but effective technological scheme. An optimized fabrication scheme was invented to obtain mechanically protected microcolumns with lateral dimensions controlled on a scale of at least 1 μm. In this paper, we investigate the influence of the environmental conditions on the mechanical resonator properties. At ambient conditions, we observed a frequency stability δf/f of less than 10−6 during 5 h of operation at almost constant temperature. However, varying the temperature shifts the frequency by approximately −173 Hz °C− 1. In accordance with a viscous damping model of the ambient gas, we perceived that the quality factor of the first flexural mode decreased with the inverse of the square root of pressure. However, in the low-pressure regime, a linear dependence was observed. We also investigated the influence of the type of the immersing gas on the resonant frequency.