Modeling, fabrication, and testing of a diamond-machined germanium immersion grating
Modeling, fabrication, and testing of a diamond-machined germanium immersion grating
复制标题
金刚石加工浸没式锗光栅的建模、制造和测试
DOI：
10.1117/12.461802
复制
发表时间：
2003
期刊：
影响因子：
--
通讯作者：
S. Little
中科院分区：
文献类型：
--
作者：
P. Kuzmenko;L. M. Little;P. Davis;S. Little
摘要本文研究了在直角锗棱镜上用金刚石加工沟槽的方法制作浸没式光栅。数值模拟代码被用来优化闪耀角，并在7.5至13.5倍的波长范围内的光栅效率的模型。偏振的灵敏度预计是小的。我们还量化了金刚石工具非零曲率半径的影响。原子力显微镜测量的均方根粗糙度为1。1 nm。在633 nm处反射时的衍射波前误差为0.01波。因此，光学像差和散射超过工作波长将是可忽略的。关键词：浸没式光栅，锗，金刚石加工1。光谱仪是确定遥远的，难以接近的对象在天文学和环境遥感的组成和属性的宝贵工具。衍射光栅是现代光谱仪的关键部件，它利用周期性结构对电磁波进行光谱色散。经典的反射光栅包括
ABSTRACT We investigated the fabrication of an immersion grating by diamond machining grooves on the hypotenuse of a right angle germanium prism. A numerical modeling code was used to optimize the blaze angle and to model grating efficiency over the wavelength range of 7.5 to 13.5 tim. The sensitivity in polarization is predicted to be small. We alsoquantified the effects of non-zero radius of curvature of the diamond tool. An atomic force microscope measured an rmsroughness of 1 . 1 nm on the grating facets. The diffracted wavefront error in reflection at 633 nm was 0.01 waves. Therefore optical aberration and scatter over the operating wavelengths will be negligible.Keywords: Immersion grating, germanium, diamond machining 1. INTRODUCTION Spectrometers are valuable tools for determining the composition and properties of distant, inaccessible objects both inastronomy and in environmental remote sensing. Diffraction gratings, which spectrally disperse electromagnetic wavesusing a periodic structure, are a key component in most modern spectrometers. The classic reflection grating consists of
DOI：
--
发表时间：
2008
期刊：
影响因子：
--
作者：
平原靖大;平尾強司;岡知路;所仁志;ほか2名
通讯作者：
ほか2名