Experiments and Global Model Analysis of Inductively Coupled CF4/O2/Ar Plasmas
Experiments and Global Model Analysis of Inductively Coupled CF4/O2/Ar Plasmas
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DOI：
10.1143/jjap.47.8537
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发表时间：
2008-11
影响因子：
1.5
通讯作者：
T. Kimura;Katsuyuki Hanaki
中科院分区：
文献类型：
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作者：
T. Kimura;Katsuyuki Hanaki
测量使用朗缪尔探针和光发射光谱结合光辐射测量进行电感耦合CF 4/O2/Ar放电在总压力低于30 mTorr的Ar含量范围从10到90%。测量的电子能量概率函数的结构可以改变从是Druyvesteyn类麦克斯韦类作为Ar含量的减少。在每个固定的Ar含量测得的电子密度随着O2含量的增加而逐渐减小，而测得的电子温度对O2含量不敏感。当O2含量与CF 4和O2含量之和的比率（ROC）为0.2左右时，在每个固定Ar含量下测量的原子氟密度达到其最大值，超过该比率，其随着ROC的增加而减小。在ROC = 0.2处测量的原子氟密度对于低于60%的Ar含量保持恒定，超过该值，其随着Ar含量的增加而单调减小。这些结果被证明是在合理的全球模型的预测电负性等离子体。
Measurements using a Langmuir probe and optical emission spectroscopy combined with actinometry are carried out in inductively coupled CF4/O2/Ar discharges at total pressures lower than 30 mTorr for Ar contents ranging from 10 to 90%. The measured structure of the electron energy probability functions can be changed from being Druyvesteyn-like to being Maxwellian-like as Ar content decreases. The electron density measured at each fixed Ar content gradually decreases with increasing O2 content, whereas the measured electron temperature is not sensitive to O2 content. The atomic fluorine density measured at each fixed Ar content reaches its maximum when the ratio (ROC) of O2 content to the sum of CF4 and O2 contents is around 0.2, beyond which it decreases with increasing ROC. The atomic fluorine density measured at ROC = 0.2 remains constant for Ar contents lower than 60%, beyond which it monotonically decreases with increasing Ar content. These results are shown to be in reasonably good agreement with the predictions of the global model for electronegative plasma.