Perpendicular coercive force of thick CoFeB thin films grown on silicon substrate

Perpendicular coercive force of thick CoFeB thin films grown on silicon substrate
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硅衬底上生长的厚CoFeB薄膜的垂直矫顽力

DOI:
10.1016/j.matlet.2014.02.099
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发表时间:
2014-05
期刊:
影响因子:
3
通讯作者:
Chen P.
Chen P.
中科院分区:
材料科学3区
文献类型:
--
作者:
Sun B.;Li G. Q.;Zhao W. X.;Shen Z.;Liu Y. H.;Chen P.

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The room-temperature magnetic properties of CoFeB thin films grown on silicon substrate were investigated. Large perpendicular coercive forces in CoFeB thin films with thickness up to 172 nm were observed. The value of the perpendicular coercive force is 1850 Oe as the thickness of the CoFeB layer is 38 nm. The large perpendicular coercive force indicates the presence of intrinsic perpendicular magnetic anisotropy in thick CoFeB layer with thickness up to 172 nm, which originates from (300) texture in CoFeB layer. The strength of perpendicular magnetic anisotropy of CoFeB depends on annealing temperature.
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