Phase-shifting via wavelength tuning in very large aperture interferometers
Phase-shifting via wavelength tuning in very large aperture interferometers
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DOI：
10.1117/12.369221
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发表时间：
1999-11
期刊：
影响因子：
--
通讯作者：
L. Deck;J. Soobitsky
中科院分区：
文献类型：
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作者：
L. Deck;J. Soobitsky
我们描述了一种高性能的干涉仪系统，该系统能够以高吞吐量对生产中的超大尺寸零件进行测量。该系统的清晰孔径为610 mm。机械稳定性是通过波长调谐的相移来解决的，这允许锁定干涉腔以增加刚性。我们详细描述了特殊的照明和光学安装系统及其对光学配置、相移和检测系统的影响，并给出了在大型光学平板上传输和反射的结果。
We describe a high performance interferometer system which provides measurements of extremely large parts in production with a high throughput. The system has a clear aperture of 610 mm. Mechanical stability is addressed by phase shifting via wavelength tuning, which allows locking the interferometric cavity for increased stiffness. We describe in detail the special illumination and optical mounting systems and their impact on the optical configuration, phase shifting and detection systems and present results on large optical flats in both transmission and reflection.