Friction properties of co-sputtered sulfide/DLC solid lubricating films
Friction properties of co-sputtered sulfide/DLC solid lubricating films
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DOI：
10.1016/j.surfcoat.2005.08.147
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发表时间：
2006-05
影响因子：
5.4
通讯作者：
Junichi Noshiro;S. Watanabe;Takahiko Sakurai;S. Miyake
中科院分区：
文献类型：
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作者：
Junichi Noshiro;S. Watanabe;Takahiko Sakurai;S. Miyake
近年来，类金刚石(DLC)薄膜因其硬度高、表面光滑、耐磨性好、润滑性好等优良的摩擦材料而备受关注，并在各个领域得到了广泛的应用。然而，DLC薄膜的摩擦系数和耐久寿命都不够充分，这取决于应用环境。因此，本研究以改善摩擦学性能为目标，以石墨、WS2和MoS2为靶材，采用多道溅射系统，在不同条件下采用共溅射的方法制备了WS2/DLC和MoS2/DLC薄膜。用透射电子显微镜观察了制备的薄膜的横截面。用拉曼光谱和俄歇电子能谱对薄膜的成分和结构进行了分析。对于薄膜的摩擦和磨损特性，使用球盘式摩擦试验机进行了测量。结果发现，根据沉积条件的不同，薄膜呈现纳米复合结构、纳米层状结构或无规层状结构。在磨损特性方面，具有纳米复合结构或纳米层状结构的薄膜表现出优于仅含DLC的薄膜的摩擦磨损特性。
In recent years, diamond-like carbon (DLC) films are attracting attention as excellent tribomaterials due to their excellent characteristics such as a high hardness, a smooth surface, antiwear property, and lubrication characteristic, and they are applied in various fields. However, both the friction coefficient and endurance life of DLC films are not sufficient depending on the application environment. Therefore, in this study, with the aim of improving tribological characteristics, we fabricated WS2/DLC and MoS2/DLC films by co-sputtering under various conditions, using a multicathode sputtering system as well as graphite, WS2and MoS2as a target. Cross-sections of the films fabricated were observed by transmission electron microscopy. In addition, the composition and structure of the films were analyzed by Raman spectroscopy and Auger electron spectroscopy. With respect to the friction and wear characteristics of the films, measurement was performed using a ball-on-disk friction tester. As a result, we found that the films show a nanocomposite structure, a nanolayered structure or a random-layered structure depending on the deposition conditions. Regarding the wear characteristics, films having a nanocomposite structure or nanolayered structure show friction and wear characteristics superior to those of a DLC-only film.