Verification of FEM analysis of load-deflection methods for measuring mechanical properties of thin films

Verification of FEM analysis of load-deflection methods for measuring mechanical properties of thin films
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验证用于测量薄膜机械性能的载荷-挠度方法的 FEM 分析

DOI：
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发表时间：
1990
期刊：
IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop
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通讯作者：
S. Senturia
S. Senturia
中科院分区：
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文献类型：
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作者：
J. Pan;P. Lin;F. Maseeh;S. Senturia

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结果表明，在对比的分析模型，这必须假设一个形状函数，有限元法（FEM）模型产生的形状函数，这个形状函数是在很好的协议与实验。通过对荷载-挠度法的有限元分析，证实了虽然解析结果的函数形式是正确的，但模型中的三个常数必须校正30%。实验测量了变形膜的形状，并与有限元计算结果相吻合，验证了有限元模型的准确性。从载荷-挠度分析中提取的杜邦PI 2525和日立PIQ 13薄膜的双轴模量和残余应力的实验值。&lt;<ETX>&gt;
It is shown that in contrast to the analytical models, which have to assume a shape function, the finite-element method (FEM) model yields the shape function, and this shape function is in good agreement with experiment. Through an extensive FEM analysis of load-deflection methods, it is confirmed that while the functional form of the analytical result is correct, three constants in the model must be corrected by as much as 30%. Experimental measurements of the deformed membrane shape have been made, and they match the FEM results, verifying the accuracy of the FEM models. Experimental values extracted from load-deflection analysis for the biaxial modulus and the residual stress of thin films of Dupont PI2525 and Hitachi PIQ13 are presented.<<ETX>>