Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom
Smith predictor-based time delay compensation for attitude control of pneumatic anti-vibration apparatuses with two degrees-of-freedom
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DOI：
10.1109/aim.2014.6878068
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发表时间：
2014-07
期刊：
影响因子：
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通讯作者：
Satoru Goto;Yukinori Nakamura;S. Wakui
中科院分区：
文献类型：
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作者：
Satoru Goto;Yukinori Nakamura;S. Wakui
在光刻设备中，晶片工作台的精密定位需要气动防振器(AVA)，它带有空气弹簧。然而，由于空气弹簧响应时滞的不同，导致了隔振台的非理想转动。本文研究了含差分时滞的AVA姿态控制问题。为了避免孤立表的旋转，采用了Smith预估器。实践证明，该方法适用于半导体制造中隔振系统中常用的模式控制型AVA。通过对参考轨迹进行整形，进一步减小了隔振台转角的超调量。
Pneumatic anti-vibration apparatuses (AVAs), which have air springs, are needed for the precision positioning of wafer stages in lithography equipment. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including difference time delays. To avoid the rotation of the isolated table, a Smith predictor is employed. It is verified that this approach can be used for the AVAs with mode control, which is often used in vibration isolation systems for semiconductor manufacturing. The overshoot of the rotational angle of the isolated table can be further reduced by shaping the reference trajectory.