Impact of selective ion transmission on measurement by retarding field analyzer
Impact of selective ion transmission on measurement by retarding field analyzer
复制标题
DOI：
10.1063/5.0144798
复制
发表时间：
2023-05
影响因子：
2.2
通讯作者：
H. Takahashi;T. Seino;R. Nishimura;K. Yoshimura;A. Kanno;T. Hara;Y. Takahashi;S. Kagaya;A. Matsuyama;Y. Hayashi;K. Tobita
中科院分区：
文献类型：
--
作者：
H. Takahashi;T. Seino;R. Nishimura;K. Yoshimura;A. Kanno;T. Hara;Y. Takahashi;S. Kagaya;A. Matsuyama;Y. Hayashi;K. Tobita
研究了选择性离子传输对减速场分析仪（RFAs）使用的影响，该影响归因于离子拉莫尔运动。根据离子拉莫尔半径和离子引导中心位置，选择性传输限制RFA体积内的平行和垂直离子速度。速度限制使I-V曲线发生扭曲，导致平行离子温度的高估。然而，在大的网格电势区域中使用斜率可以将高估降低到可接受的水平。选择性透射的影响取决于平行和垂直离子温度。这种性质可能允许通过实验数据的最佳拟合同时确定两个离子温度，甚至从单个I-V曲线。该方法的适用性进行了研究，使用射频等离子体。
The impact of selective ion transmission on the use of retarding field analyzers (RFAs), which is attributed to the ion Larmor motion, was investigated. Depending on the ion Larmor radius and ion guiding center position, selective transmission limits the parallel and perpendicular ion velocities inside the RFA volume. The velocity limitation flattens I–V curve, leading to an overestimation of the parallel ion temperature. However, the overestimation can be reduced to an acceptable level using the slope in a large grid potential region. The influence of selective transmission depends on both parallel and perpendicular ion temperatures. This nature likely allows the simultaneous determination of two ion temperatures by the best fit of the experimental data, even from a single I–V curve. Applicability of this method was investigated using a radio frequency plasma.