High Sensitivity Micro-Thermal Conductivity Detector for Gas Chromatography

High Sensitivity Micro-Thermal Conductivity Detector for Gas Chromatography
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DOI：
10.1109/memsys.2009.4805369
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发表时间：
2009-03
期刊：
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
影响因子：
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通讯作者：
B. Kaanta;H. Chen;G. Lambertus;W. Steinecker;O. Zhdaneev;X. Zhang
B. Kaanta;H. Chen;G. Lambertus;W. Steinecker;O. Zhdaneev;X. Zhang
中科院分区：
其他
文献类型：
--
作者：
B. Kaanta;H. Chen;G. Lambertus;W. Steinecker;O. Zhdaneev;X. Zhang

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本文描述了微型热导检测器 (TCD) 的设计、制造和测试，其检测限为十亿分之 260（氦中的己烷）、无过量死体积、低功耗、快速响应时间 (150 µs) 和对流速的低灵敏度。值得注意的是，该 TCD 在 104 倍浓度范围内具有线性响应和高灵敏度；据我们所知，这种线性和灵敏度以前从未在 a¿TCD 中得到证实。检查几种配置的热传导特性以确定它们对性能的影响。
Design, fabrication and testing of a micro thermal conductivity detector (¿TCD) with a detection limit of 260 parts per billion (hexane in helium), no excess dead-volume, low power consumption, fast response time (150 ¿sec) and low sensitivity to flow rate is described herein. Significantly, this ¿TCD is shown to have a linear response and high sensitivity across a 104-fold concentration range; to the best of our knowledge this linearity and sensitivity has not been previously shown for a¿TCD. The thermal conduction properties of several configurations are examined to identify their influence on performance.