The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)
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DOI:
10.1088/1361-6641/32/1/013005
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发表时间:
2016-12
影响因子:
1.9
通讯作者:
C. Arutt;M. Alles;W. Liao;H. Gong;J. Davidson;peixiong zhao;R. Reed;R. Weller;K. Bolotin;R. Nicholl;T. Pham;A. Zettl;Du Qingyang;Juejun Hu;Mo Li;B. Alphenaar;Ji-Tzuoh Lin;Pranoy Deb Shurva;S. Mcnamara;K. Walsh;P. Feng;L. Hutin;T. Ernst;B. Homeijer;R. Polcawich;R. Proie;Jacob L. Jones;E. Glaser;C. Cress;N. Bassiri‐Gharb
C. Arutt;M. Alles;W. Liao;H. Gong;J. Davidson;peixiong zhao;R. Reed;R. Weller;K. Bolotin;R. Nicholl;T. Pham;A. Zettl;Du Qingyang;Juejun Hu;Mo Li;B. Alphenaar;Ji-Tzuoh Lin;Pranoy Deb Shurva;S. Mcnamara;K. Walsh;P. Feng;L. Hutin;T. Ernst;B. Homeijer;R. Polcawich;R. Proie;Jacob L. Jones;E. Glaser;C. Cress;N. Bassiri‐Gharb
中科院分区:
工程技术4区
文献类型:
--
作者:
C. Arutt;M. Alles;W. Liao;H. Gong;J. Davidson;peixiong zhao;R. Reed;R. Weller;K. Bolotin;R. Nicholl;T. Pham;A. Zettl;Du Qingyang;Juejun Hu;Mo Li;B. Alphenaar;Ji-Tzuoh Lin;Pranoy Deb Shurva;S. Mcnamara;K. Walsh;P. Feng;L. Hutin;T. Ernst;B. Homeijer;R. Polcawich;R. Proie;Jacob L. Jones;E. Glaser;C. Cress;N. Bassiri‐Gharb

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由于材料和制造工艺的进步,微型和纳米机电系统(M和NEMS)的潜力已经扩大。目前正在寻找和部署用于M和NEMS的各种材料,包括碳化硅(SIC)、III-V材料、薄膜压电和铁电、电光和二维原子晶体,如石墨烯、六方氮化硼(h-BN)和二硫化钼(MoS2)。这些类型的设备提供的小型化、功能性和低功耗操作对于许多应用领域都很有吸引力,包括物理科学、医疗、空间和军事用途,其中暴露在辐射中是可靠性的考虑因素。了解辐射对这些材料和器件的影响对于在辐射环境中应用是必要的。
The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III–V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS2). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.