Transparent hybrid polymer stamp copies with sub-50-nm resolution for thermal and UV-nanoimprint lithography
Transparent hybrid polymer stamp copies with sub-50-nm resolution for thermal and UV-nanoimprint lithography
复制标题
用于热和紫外纳米压印光刻的透明混合聚合物印模副本，分辨率低于 50 nm
DOI：
10.1116/1.3250207
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发表时间：
2009
影响因子：
1.4
通讯作者：
H. Solak
中科院分区：
文献类型：
--
作者：
H. Schift;C. Spreu;M. Saidani;M. Bednarzik;J. Gobrecht;A. Klukowska;F. Reuther;G. Gruetzner;H. Solak
有机-无机杂化聚合物Ormostamp被成功地用于制造廉价、透明的工作邮票，用于纳米压印光刻。这些邮票是由不同的母版通过浇铸和对粘性前体进行紫外线曝光而生产的。具有复制表面浮雕的固化混合印章被压印到几种热塑性材料上，压印温度高达180 °C。在这篇文章中，作者展示了压印温度对结构保真度的影响。在压印温度为110 °C的条件下，采用热压印和紫外光压印相结合的光刻技术，实现了35 nm的分辨率。他们还研究了等离子体处理造成的劣化效应，以模拟多个重新涂层步骤的影响。
The organic-inorganic hybrid polymer Ormostamp was successfully used for the fabrication of inexpensive, transparent working stamps to be used in nanoimprint lithography. The stamps were produced from different masters by casting and UV exposure of a viscous precursor. The cured hybrid stamp with the replicated surface relief was imprinted into several thermoplastic materials with up to 180 °C imprint temperature. In this article the authors show the effect of the imprint temperature on the structural fidelity. By using combined thermal and UV-nanoimprint lithography at 110 °C imprint temperature, a resolution down to 35 nm is demonstrated. They also investigated deterioration effects due to plasma treatment to simulate the effect of multiple recoating steps.