Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance
Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance
复制标题
聚合物衍生的 SiBCN 陶瓷压力传感器，具有出色的传感性能
DOI：
10.1007/s40145-020-0377-6
复制
发表时间：
2020-06-01
影响因子：
16.9
通讯作者：
Zhang, Rui
中科院分区：
文献类型：
--
作者：
Shao, Gang;Jiang, Junpeng;Zhang, Rui
特别是在高温和恶劣环境下，非常需要具有优异稳定性和长时间耐用性的压力测量。基于硅硼碳氮化物（SiBCN）陶瓷的巨大压阻效应，设计了一种具有良好稳定性、准确性和重复性的SiBCN陶瓷压力传感器。将SiBCN陶瓷传感器封装在不锈钢外壳中，并采用半惠斯通电桥进行单轴压力测试，测试压力高达10 MPa。SiBCN陶瓷表现出显著的压阻效应，应变系数（K）高达5500。封装SiBCN陶瓷传感器的输出电压随外压的变化呈单调平滑的变化。所研制的SiBCN压力传感器具有响应时间短、重复性好、稳定性好、灵敏度高、准确度高等特点。利用聚合物衍生的SiBCN陶瓷优异的高温热机械性能（例如，SiBCN陶瓷传感器具有良好的高温稳定性、抗氧化性和抗腐蚀性，在高温和恶劣环境下的压力测量中具有巨大的潜力。
Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based on the giant piezoresistivity of SiBCN ceramics. The SiBCN ceramic sensor was packaged in a stainless steel case and tested using half Wheatstone bridge with the uniaxial pressure up to 10 MPa. The SiBCN ceramic showed a remarkable piezoresistive effect with the gauge factor (K) as high as 5500. The output voltage of packed SiBCN ceramic sensor changes monotonically and smoothly versus external pressure. The as received SiBCN pressure sensor possesses features of short response time, excellent repeatability, stability, sensitivity, and accuracy. Taking the excellent high temperature thermo-mechanical properties of polymer-derived SiBCN ceramics (e.g., high temperature stability, oxidation/corrosion resistance) into account, SiBCN ceramic sensor has significant potential for pressure measurement at high temperature and harsh environments.