Development of Deep Gratings for Wavelength Dispersion Applications
Development of Deep Gratings for Wavelength Dispersion Applications
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开发用于波长色散应用的深光栅
DOI：
10.1143/jjap.42.3434
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发表时间：
2003
影响因子：
1.5
通讯作者：
Y. Ichioka
中科院分区：
文献类型：
--
作者：
Wanji Yu;Yoshinori Oshita;H. Toyota;T. Konishi;T. Yotsuya;Y. Ichioka
针对波长色散的应用，研制了具有不同空间频率的深光栅。从理论上研究了该器件的衍射效率、波长色散能力和波长带宽等衍射性能。高的衍射效率，宽的波长色散能力和宽的波长范围证明了我们的应用所开发的光栅的显着优势。对于制造过程，已经提出了一种用于合成光栅轮廓以产生用于实际应用的最佳光学性能并且通过微制造技术容易地实现高保真度的方法。实验结果表明，采用该方法制作的光栅衍射效率大于95%，同时保留了宽色散，降低了衍射波动。
The deep gratings with ultrahigh spatial frequencies have been developed for wavelength dispersion applications. The diffraction performances, including diffraction efficiencies, wavelength dispersive abilities and wavelength band, have been theoretically investigated. The high diffraction efficiencies, wide wavelength dispersive abilities and broad wavelength range proved the significant advantages of the developed gratings for our applications. For the fabrication process, a method for synthesizing the grating profiles to produce optimal optical performances for practical applications and for easily achieving high fidelity by microfabrication technologies has been proposed. The experimental results show that the fabricated gratings using the synthesis method have diffraction efficiencies higher than 95%, while the wide wavelength dispersions are reserved, and low diffraction fluctuations are also reduced.