Rotational mode disk resonators for high-Q operation in liquid
Rotational mode disk resonators for high-Q operation in liquid
复制标题
用于液体中高 Q 操作的旋转模式盘式谐振器
DOI：
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发表时间：
2010
期刊：
影响因子：
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通讯作者：
S. Pourkamali
中科院分区：
文献类型：
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作者：
A. Rahafrooz;S. Pourkamali
这项工作提出了热致旋转式微机械圆盘谐振器与压阻读出专门设计的高Q运行在液体中。与之前展示的工作在液体中的微谐振器不同，所提出的结构的所有表面在感兴趣的共振模式下平行于液体界面滑动，与周围流体的相互作用最小。这已被证明显著减少了进入液体的能量损失以及液体的质量负荷。对于在水中工作的这种谐振器，测量到的质量因数高达280，比以前报告的最高值高出三倍多。通过进一步优化谐振器尺寸和其他设计参数，有望实现更高的品质因数。
This work presents thermally actuated rotational mode micromechanical disk resonators with piezoresistive readout specially designed for high-Q operation in liquid. Unlike the previously demonstrated micro-resonators operating in liquid, all the surfaces of the proposed structures in the resonant mode of interest slide in parallel to the liquid interface having minimal interaction with the surrounding fluid. This has been shown to significantly reduce the energy loss into the liquid as well as mass loading by the liquid. Quality factors as high as 280 have been measured for such resonators operating in water which is more than three times higher than the highest values previously reported. Much higher quality factors are expected to be achievable by further optimization of resonator dimensions and other design parameters.