Phase Change NEMS Relay
Phase Change NEMS Relay
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相变 NEMS 继电器
DOI：
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发表时间：
2019
期刊：
影响因子：
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通讯作者：
G. Piazza
中科院分区：
文献类型：
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作者：
J. Best;M. A. Masud;M. D. de Boer;G. Piazza
首次演示了高度可扩展的相变机械继电器的驱动。相变 NEMS 继电器 (PCNR) 是一种基于 GeTe 相变材料机械膨胀的非易失性继电器。经证明，导通状态电阻约为 260 Ω，断态漏电流低至 20 fA。开关延迟时间被证明分别为 300 ns 和 600 ns。缩放分析显示了通往 20 nm × 5 nm 尺寸器件的路径，其驱动电压和能量分别为 500 mV 和 70 fJ。
Actuation of a highly scalable phase change mechanical relay is demonstrated for the first time. The Phase Change NEMS Relay (PCNR) is a non-volatile relay based on the mechanical expansion of GeTe phase change material. On state resistance was demonstrated to be ~260 Ω and an off state leakage as low as 20 fA was recorded. Switching on and off delay times were demonstrated to be 300 ns and 600 ns, respectively. Scaling analysis shows a path towards 20 nm × 5 nm size devices with an actuation voltage and energy of 500 mV and 70 fJ, respectively.