Integrated Micro-Displacement Sensor that can Measure Tilting or Linear Motion for an External Mirror
Integrated Micro-Displacement Sensor that can Measure Tilting or Linear Motion for an External Mirror
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集成微位移传感器，可测量外镜的倾斜或线性运动
DOI：
10.1109/omems.2006.1708260
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
I. Ishikawa
中科院分区：
文献类型：
--
作者：
R. Sawada;E. Higurashi;S. Sanada;D. Chino;I. Ishikawa
利用垂直腔面发射激光器(VCSEL)的发散光束，研制了一种集成光学微位移传感器。该传感器由一个1.5 mm×1.5 mm×1 mm的VCSEL组成，周围环绕着三个光电二极管。它可以测量行进的直线距离或外镜的倾斜角。对于0.4 mm的测量范围，分辨率为10 nm；对于1.8 mm的较宽测量范围，分辨率小于40 nm。可测倾角的全量程为5度。传感器可以集成到带有微镜的设备中，例如集成扫描显微镜
An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL of 1.5 mmtimes1.5 mmtimes1 mm that is surrounded by three photodiodes. It can measure the linear distance traveled or the tilting angle for an external mirror. The resolution is 10 nm for a measurement range of 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5deg. The sensors can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes