Magnetic microscopy for ICs failure analysis : comparative case studies using SQUID, GMR and MTJ systems

Magnetic microscopy for ICs failure analysis : comparative case studies using SQUID, GMR and MTJ systems
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用于 IC 故障分析的磁显微镜：使用 SQUID、GMR 和 MTJ 系统的比较案例研究

DOI：
10.1016/j.microrel.2004.07.059
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发表时间：
2004
期刊：
Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 (IEEE Cat. No.04TH8743)
影响因子：
--
通讯作者：
A. Firiti
A. Firiti
中科院分区：
--
文献类型：
--
作者：
O. Crépel;P. Poirier;P. Descamps;R. Desplats;P. Perdu;G. Haller;A. Firiti

文献摘要

被引文献

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基于磁场的技术已经显示出用于调查IC中的电流流动的巨大能力。回顾SQUID，GMR（硬盘磁头技术）和MTJ现有的传感器的性能后，我们提出的各种案例研究中获得的结果。该比较根据每个案例研究（封装器件、倒装芯片电路等）显示了每种方法的优势。最后，我们讨论了所得的结果来分类当前的技术，最佳的应用领域和优势。
Magnetic field based techniques have shown great capabilities for investigation of current flows in ICs. After reviewing the performances of SQUID, GMR (hard disk head technologies) and MTJ existing sensors, we present results obtained on various case studies. This comparison shows the benefit of each approach according to each case study (packaged devices, flip-chip circuits,...). Finally we discuss the obtained results to classify current techniques, optimal domain of applications and advantages.