ZrN/Cu nanocomposite film—a novel superhard material
ZrN/Cu nanocomposite film—a novel superhard material
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DOI：
10.1016/s0257-8972(99)00482-x
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发表时间：
1999-11
影响因子：
5.4
通讯作者：
J. Musil;P. Zeman;H. Hrubý;P. Mayrhofer
中科院分区：
文献类型：
--
作者：
J. Musil;P. Zeman;H. Hrubý;P. Mayrhofer
本文报道了用直径为100 mm的圆形平面非平衡磁控管，在Ar+N_2混合气体中，用直流反应磁控溅射法制备的ZrCu-N薄膜的结构和硬度。研究发现，薄膜的结构与其硬度之间有很强的相关性。硬质(<；40 Gpa)ZrCu-N薄膜具有多个多向取向的ZrN和Cu颗粒的弱反射特征。相反，超硬(≥40 Gpa)薄膜的特征是从以(111)择优取向为主的ZrN颗粒强烈反射，没有来自铜的反射。该超硬薄膜的硬度为54 Gpa，是由强取向的ZrN颗粒和一层薄的铜层组成的纳米复合薄膜。这些薄膜表现出约80%的高弹性回复率(由显微硬度计测定)，并含有约1-2wt.%的铜。超硬纳米复合膜代表了一类新型的超硬材料--NC-MEN/金属。
This article reports on the structure and hardness of ZrCu–N films prepared by dc reactive magnetron sputtering of a ZrCu alloyed target in a mixture of Ar+N2using a round planar unbalanced magnetron of diameter 100mm. It was found that there is a strong correlation between the structure of the film and its hardness. The hard (<40GPa) ZrCu–N films are characterized by many weak reflections from poly-oriented ZrN and Cu grains. In contrast, the superhard (≥40GPa) ZrCu–N films are characterized by a strong reflection from ZrN grains with a dominate ZrN(111) orientation and no reflections from Cu. The superhard ZrCu–N films with a hardness of 54GPa are nc-ZrN/Cu nanocomposite films composed of strongly oriented ZrN grains surrounded by a thin layer of Cu. These films exhibit a high elastic recovery of about 80% (determined by a microhardness tester) and contain approximately 1–2 wt.% Cu. The superhard nc-ZrN/Cu nanocomposite films represent a new class of superhard materials of the type nc-MeN/metal.