An Introduction to Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) and its Application to Materials Science
An Introduction to Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) and its Application to Materials Science
复制标题
飞行时间二次离子质谱 (ToF-SIMS) 简介及其在材料科学中的应用
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
S. Fearn
中科院分区：
文献类型：
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作者：
S. Fearn
这本书强调了飞行时间二次离子质谱（ToF-SIMS）用于高分辨率表面分析和材料表征的应用。在提供SIMS原理的简要概述的同时，它还提供了如何使用双光束ToF-SIMS来研究一系列材料系统和特性的示例。多年来，自最早的二次离子质谱仪首次开发以来，SIMS仪器仪表发生了巨大变化。仪器曾经专门用于使用高离子束电流分析材料的深度剖面，以分析材料的近表面到块状区域（动态SIMS），或使用非常低的光束电流（静态SIMS）产生样品最外表面复杂质谱的飞行时间仪器。现在，随着双光束仪器的发展这两个截然不同的领域重叠了。
This book highlights the application of Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) for high-resolution surface analysis and characterization of materials. While providing a brief overview of the principles of SIMS, it also provides examples of how dual-beam ToF-SIMS is used to investigate a range of materials systems and properties. Over the years, SIMS instrumentation has dramatically changed since the earliest secondary ion mass spectrometers were first developed. Instruments were once dedicated to either the depth profiling of materials using high-ion-beam currents to analyse near surface to bulk regions of materials (dynamic SIMS), or time-of-flight instruments that produced complex mass spectra of the very outer-most surface of samples, using very low-beam currents (static SIMS). Now, with the development of dual-beam instruments these two very distinct fields now overlap.