Metallization of Cu on polytetrafluoroethylene modified by keV Ar+ ion irradiation
Metallization of Cu on polytetrafluoroethylene modified by keV Ar+ ion irradiation
复制标题
keV Ar离子辐照改性聚四氟乙烯上Cu金属化
DOI：
10.1116/1.590018
复制
发表时间：
1998
影响因子：
1.4
通讯作者：
K. Yoon
中科院分区：
文献类型：
--
作者：
J. Cho;W. Choi;S. Koh;K. Yoon
通过1 keV氩离子（Ar⁺）辐照改变离子剂量对聚四氟乙烯（PTFE）表面进行改性，并在改性后的PTFE上沉积5000 Å的铜膜。扫描电子显微镜研究表明，改性PTFE的表面纹理呈细丝状，其高度随离子剂量增加而增加。通过X射线光电子能谱发现，由于氟原子的优先溅射，F 1s峰的强度随离子剂量降低，并且在新的不稳定链中通过交联形成了C - C和/或C - F链。铜膜沿着改性PTFE上形成的细丝均匀沉积。在改性PTFE上沉积的铜膜的X射线衍射谱中，发现沿（111）和（200）面有择优取向，并且（111）/（200）取向的相对强度随着改性PTFE表面粗糙度的增加而增加。铜膜的电阻率从未改性PTFE的2.7 μΩ·cm变为改性PTFE的4.3 μΩ·cm……
A surface of polytetrafluoroethylene (PTFE) was modified with changing ion doses by 1 keV Ar+ ion irradiation and Cu films with a 5000 A were deposited on the modified PTFE. The scanning electron microscopy study showed that the surface texture of modified PTFE was in the form of filaments whose height increased depending on ion doses. Through x-ray photoelectron spectroscopy spectra, it was found that the intensity of F 1s peaks decreased with ion doses by preferential sputtering of F atoms and the C–C and/or C–F chains were formed by the crosslinking in the newly unstable chains. Cu films were deposited uniformly along the filaments formed on the modified PTFE. In x-ray diffraction spectra of deposited Cu films on modified PTFE, a preferred orientation along (111) and (200) planes was found and a relative intensity of (111)/(200) orientation increased as surface roughness of modified PTFE increased. The resistivity of Cu films was changed from 2.7 μΩ cm of unmodified PTFE to 4.3 μΩ cm of modified PTFE a...