Single-step spatial rotation error separation technique for the ultraprecision measurement of surface profiles.
Single-step spatial rotation error separation technique for the ultraprecision measurement of surface profiles.
复制标题
用于表面轮廓超精密测量的单步空间旋转误差分离技术。
作者：
Maosheng Hou;Lirong Qiu;Weiqian Zhao;Fan Wang;E. Liu;Lin Ji
为了提高大型光学表面轮廓仪的测量精度，提出了一种新的单步空间旋转误差分离技术（SSEST），将表面轮廓误差和主轴空间旋转误差分离，并开发了基于SSEST的新型表面轮廓测量系统。在误差分离过程中，误差分离台旋转前后分别获得第i个测量圆的两组测量结果，利用离散傅立叶变换和谐波分析，可以确定主轴的面形误差和空间旋转误差。理论分析和实验结果表明，在1-100 upr的测量范围内，SSEST能准确地将主轴的空间旋转误差与面形测量结果分离，提高了面形测量的精度。
To improve the measurement accuracy of the profilometer for large optical surfaces, a new single-step spatial rotation error separation technique (SSEST) is proposed to separate the surface profile error and spindle spatial rotation error, and a novel SSEST-based system for surface profile measurement is developed. In the process of separation, two sets of measured results at the ith measurement circle are obtained before and after the rotation of error separation table, the surface profile error and spatial rotation error of spindle can be determined using discrete Fourier-transform and harmonic analysis. Theoretical analyses and experimental results indicate that SSEST can accurately separate spatial rotation error of spindle from the measured surface profile results within the range of 1-100 upr and improve the accuracy of surface profile measurements.