Ferroelectric-Gate Field-Effect Transistor Memory With Recessed Channel

Ferroelectric-Gate Field-Effect Transistor Memory With Recessed Channel
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具有凹槽通道的铁电栅场效应晶体管存储器

DOI:
10.1109/led.2020.3001129
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发表时间:
2020
影响因子:
4.9
通讯作者:
D. Kwon
D. Kwon
中科院分区:
工程技术2区
文献类型:
--
作者:
Kitae Lee;J. Bae;Sihyun Kim;Jong;Byung;D. Kwon

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我们展示了一种新型的铁电栅场效应晶体管与凹陷沟道(R-FeFET),以提高存储器窗口(MW),编程/擦除速度,长时间保持,和耐久性同时。基于包括校准的铁电材料(FE)参数的技术计算机辅助设计(TCAD)模拟,揭示了与常规平面FeFET相比,通过FE上的更大电场(e场)增强极化,从而导致更宽的MW和更快的编程/擦除速度。此外,R-FeFET的耐久性/保持性预期将得到改善,因为跨SiO2夹层的电场显著降低。
We demonstrate a novel ferroelectric-gate field effect transistor with recessed channel (R-FeFET) to improve memory window (MW), program/erase speed, long-time retention, and endurance simultaneously. Based on technology computer-aided design (TCAD) simulations including calibrated ferroelectric material (FE) parameters, it is revealed that the polarization is enhanced by the larger electric field (e-field) across the FE compared to a conventional planar FeFET, resulting in the wider MW and the faster program/erase speed. Moreover, the endurance/retention of the R-FeFET is expected to be improved as the e-field across the SiO2 interlayer is significantly reduced.
DOI: 10.1038/s41586-020-2208-x
发表时间: 2020-04-01
期刊: NATURE
影响因子: 64.8
作者:
Cheema, Suraj S.;Kwon, Daewoong;Salahuddin, Sayeef
通讯作者: Salahuddin, Sayeef