Size-changeable x-ray beam collimation using an adaptive x-ray optical system based on four deformable mirrors
Size-changeable x-ray beam collimation using an adaptive x-ray optical system based on four deformable mirrors
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使用基于四个可变形镜的自适应 X 射线光学系统进行尺寸可变的 X 射线光束准直
DOI：
10.1117/12.2238794
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
and K. Yamauchi
中科院分区：
文献类型：
--
作者：
T. Goto;S. Matsuyama;H. Nakamori;H. Hayashi;Y. Sano;Y. Kohmura;M. Yabashi;T. Ishikawa;and K. Yamauchi
在SPring-8上建立了一个由四个压电变形镜组成的两级自适应光学系统，用于形成准直X射线束。基于用X射线笔形束扫描方法测量的形状数据，可变形反射镜被精细地变形为目标形状（上游反射镜为椭圆形，下游反射镜为抛物线形）。超精密控制的反射镜的形状，使我们能够获得不同的准直光束的314 μm（358 μm）和127 μm（65 μm）的水平（垂直）方向上的不同光束尺寸，分别与平行度精度为1 μrad rms。
A two-stage adaptive optical system using four piezoelectric deformable mirrors was constructed at SPring-8 to form collimated X-ray beams. The deformable mirrors were finely deformed to target shapes (elliptical for the upstream mirrors and parabolic for the downstream mirrors) based on shape data measured with the X-ray pencil beam scanning method. Ultraprecise control of the mirror shapes enables us to obtain various collimated beams with different beam sizes of 314 μm (358 μm) and 127 μm (65 μm) in the horizontal (vertical) directions, respectively, with parallelism accuracy of ~ 1 μrad rms.