Design and Fabrication of Vibration Based Energy Harvester Using Microelectromechanical System Piezoelectric Cantilever for Low Power Applications
Design and Fabrication of Vibration Based Energy Harvester Using Microelectromechanical System Piezoelectric Cantilever for Low Power Applications
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DOI：
10.1166/jnn.2013.8106
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发表时间：
2013-12-01
影响因子：
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通讯作者：
Kwon, Kwang-Ho
中科院分区：
文献类型：
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作者：
Kim, Moonkeun;Lee, Sang-Kyun;Kwon, Kwang-Ho
我们在微机电系统（MEMS）尺度上用集成的防硅质量制造了双梁悬臂梁。设计了一种Pb(Zr,Ti)O-3 （PZT）悬臂梁作为低功耗应用的机械振动能量收集系统。采用有限元法对多层复合悬臂梁的谐振频率进行了模拟，并在设计过程中进行了参数化分析。仿真结果表明，在最优电阻和0.5 g（重力加速度，m/s(2)）下，双梁悬臂梁的谐振频率为69.1 Hz，电压为113.9 mV，平均功率为0.303 mu W。基于这些数据，我们随后使用双梁悬臂梁制作悬臂装置。双梁悬臂梁的收获功率密度与仿真结果比较良好。实验结果表明，谐振频率为78.7 Hz，电压为118.5 mV，平均功率密度为0.34 mu W。测量结果与模拟结果的误差约为10%。制备的双梁悬臂梁在1g时的最大平均功率和功率密度分别为0.803 mu W和1322.80 mu W cm（-3）。此外，还测试了用于能量转换实验的mems级电源的可能性。
We fabricated dual-beam cantilevers on the microelectromechanical system (MEMS) scale with an integrated Si proof mass. A Pb(Zr,Ti)O-3 (PZT) cantilever was designed as a mechanical vibration energy-harvesting system for low power applications. The resonant frequency of the multilayer composition cantilevers were simulated using the finite element method (FEM) with parametric analysis carried out in the design process. According to simulations, the resonant frequency, voltage, and average power of a dual-beam cantilever was 69.1 Hz, 113.9 mV, and 0.303 mu W, respectively, at optimal resistance and 0.5 g (gravitational acceleration, m/s(2)). Based on these data, we subsequently fabricated cantilever devices using dual-beam cantilevers. The harvested power density of the dual-beam cantilever compared favorably with the simulation. Experiments revealed the resonant frequency, voltage, and average power density to be 78.7 Hz, 118.5 mV, and 0.34 mu W, respectively. The error between the measured and simulated results was about 10%. The maximum average power and power density of the fabricated dual-beam cantilever at 1 g were 0.803 mu W and 1322.80 mu W cm(-3), respectively. Furthermore, the possibility of a MEMS-scale power source for energy conversion experiments was also tested.