Carbon nanotube-enhanced capillary condensation for a capacitive humidity sensor
Carbon nanotube-enhanced capillary condensation for a capacitive humidity sensor
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DOI：
10.1088/0957-4484/17/21/026
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发表时间：
2006-11-14
期刊：
影响因子：
3.5
通讯作者：
She, J. P. M.
中科院分区：
文献类型：
--
作者：
Yeow, J. T. W.;She, J. P. M.
本文介绍了一种用于室温湿度检测的电容式湿度传感器。该传感器是通过在不锈钢基底之一上沉积多壁碳纳米管（MWCNTs）制成的。与不含碳纳米管的传感器相比，在相对湿度（RH）低于70%时，碳纳米管增强型传感器的电容响应提高了60 - 200%；如果相对湿度超过70%，则提高300 - 3000%。其性能与霍尼韦尔的一款商用传感器相当，该商用传感器在整个实验中被用作基准。我们的研究结果表明，像多壁碳纳米管这样的纳米材料能够自然形成多孔纳米结构网络，这有可能实现一种具有更高灵敏度的微型电容式湿度传感器。性能的提升归因于毛细冷凝效应。
A capacitive humidity sensor is presented for moisture detection at room temperature. The sensor is fabricated by depositing multi-wall carbon nanotubes (MWCNTs) on one of the stainless-steel substrates. When compared to a sensor without CNTs, a CNT-enhanced sensor has an increase of 60-200% in capacitance response when the humidity is under 70% relative humidity (RH), and 300-3000% if the RH level goes over 70%. The performance is comparable to a commercial sensor from Honeywell, which is used as a benchmark throughout the experiments. Our results demonstrate that nano-materials like MWCNTs can naturally form networks of porous nano-structures, which can potentially realize a miniature capacitive humidity sensor with a higher sensitivity. The gain in performance is attributed to the capillary condensation effect.