Surface analysis and pumping speed measurements of oxygen-free palladium/titanium nonevaporable getter after heating at 100?450?°C
Surface analysis and pumping speed measurements of oxygen-free palladium/titanium nonevaporable getter after heating at 100?450?°C
复制标题
无氧钯/钛非蒸发吸气剂在100?450?℃加热后的表面分析和抽速测量
DOI：
10.1116/1.5111879
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发表时间：
2019
影响因子：
1.4
通讯作者：
Mase Kazuhiko
中科院分区：
文献类型：
--
作者：
Miyazawa Tetsuya;Sugawara Yuta;Yoshikawa Ichiro;Sato Yuta;Ohno Shinya;Okada Tomohiro;Matsumoto Masuaki;Kikuchi Takashi;Mase Kazuhiko
