A surface motor-driven planar motion stage integrated with an XY0z surface encoder for precision positioning
A surface motor-driven planar motion stage integrated with an XY0z surface encoder for precision positioning
复制标题
DOI：
10.1016/j.precisioneng.2003.12.003
复制
发表时间：
2004-07-01
影响因子：
3.6
通讯作者：
Tomita, Y
中科院分区：
文献类型：
--
作者：
Gao, W;Dejima, S;Tomita, Y
本文介绍了一种表面电机驱动的XY平面运动平台，该平台配备了新开发的XYthetaZ表面编码器，用于亚微米定位。表面电机由放置在同一曲面上的四个直线电机组成，在XY轴上有两对。直线电机的磁阵和定子绕组分别安装在压盘(移动元件)和台座上。压板可以通过X直线电机在X方向上移动，也可以由Y直线电机在Y方向上移动。如果X或Y直线电机绕Z轴产生力矩，它也可以绕Z轴旋转。该表面编码器由两个二维角传感器和一个表面带有二维正弦波的角度栅格组成。角栅安装在由空气轴承悬浮的舞台压板上。角度传感器和气浮垫固定在台座上，使压盘的运动不受电子线和空气软管的影响。压盘的XY位置和theta(Z)旋转可以从角度传感器输出分别以大约20 nm和0.2“的分辨率获得。表面编码器放置在工作台内部，使得工作台系统尺寸非常紧凑。实验结果表明，可以分别在X、Y和theta(Z)上独立进行精确定位，分辨率分别为200 nm和1。(C)2004 Elsevier Inc.保留所有权利。
This paper describes a surface motor-driven XY planar motion stage equipped with a newly developed XYthetaZ surface encoder for sub-micron positioning. The surface motor consists of four linear motors placed on the same surface, two pairs in the XY-axes. The magnetic array and the stator winding of the linear motor are mounted on the platen (the moving element) and the stage base, respectively. The platen can be moved in the X-direction by the X-linear motors, and in the Y-direction by the Y-linear motors. It can also be rotated about the Z-axis if the X- or Y-linear motors generate a moment about the Z-axis. The surface encoder consists of two two-dimensional angle sensors and an angle grid with two-dimensional sinusoidal waves on its surface. The angle grid is mounted on the platen of the stage which is levitated by air-bearings. The angle sensors and the air-bearing pads are fixed on the stage base so that the motion of the platen is not affected by the electronic cables and air hoses. The XY-positions and theta(Z) rotation of the platen can be obtained from the angle sensor outputs with resolutions of approximately 20 nm and 0.2", respectively. The surface encoder is placed inside the stage so that the stage system is very compact in size. Experimental results indicate that precision positioning can be carried out independently in X, Y and theta(Z) with resolutions of 200 nm and 1, respectively. (C) 2004 Elsevier Inc. All rights reserved.