Scalable fabrication of a hybrid field-effect and acousto-electric device by direct growth of monolayer MoS2/LiNbO3.
Scalable fabrication of a hybrid field-effect and acousto-electric device by direct growth of monolayer MoS2/LiNbO3.
复制标题
DOI：
10.1038/ncomms9593
复制
发表时间：
2015-10-23
影响因子：
16.6
通讯作者：
Krenner HJ
中科院分区：
文献类型：
--
作者：
Preciado E;Schülein FJR;Nguyen AE;Barroso D;Isarraraz M;von Son G;Lu IH;Michailow W;Möller B;Klee V;Mann J;Wixforth A;Bartels L;Krenner HJ
钛酸锂是典型的铁电材料，是表面声波、射频器件和集成光学等众多应用的首选衬底。它提供了大量的压电和双折射性能的独特组合，但其缺乏光学活性和半导体传输阻碍在光电子学中的应用。在这里，我们制造和表征的混合二硫化钼/铌酸锂声电器件通过一个可扩展的路线，使用毫米级直接化学气相沉积的二硫化钼，然后由光刻定义的场效应晶体管结构的顶部。该原型器件具有与硅上的MoS 2器件竞争的电特性。在基底上激发的表面声波可以以无接触的方式操纵和探测单层器件中的电输运。我们实现了一个声音驱动的电池和声学光电探测器。我们的研究结果打开方向的非侵入性调查的电性能的单层膜。 锂离子电池具有压电和双折射特性，可用于光学，但它不容易与传统的光电子集成。在这里，作者创建了一个设备，传感光电导在半导体二硫化钼使用表面声波激发在锂碳酸盐。
Lithium niobate is the archetypical ferroelectric material and the substrate of choice for numerous applications including surface acoustic wave radio frequencies devices and integrated optics. It offers a unique combination of substantial piezoelectric and birefringent properties, yet its lack of optical activity and semiconducting transport hamper application in optoelectronics. Here we fabricate and characterize a hybrid MoS2/LiNbO3 acousto-electric device via a scalable route that uses millimetre-scale direct chemical vapour deposition of MoS2 followed by lithographic definition of a field-effect transistor structure on top. The prototypical device exhibits electrical characteristics competitive with MoS2 devices on silicon. Surface acoustic waves excited on the substrate can manipulate and probe the electrical transport in the monolayer device in a contact-free manner. We realize both a sound-driven battery and an acoustic photodetector. Our findings open directions to non-invasive investigation of electrical properties of monolayer films. Lithium niobate has piezoelectric and birefringent properties useful for optics, but it is not readily integrated with traditional optoelectronics. Here, the authors create a device that senses photoconductance in semiconducting molybdenum disulfide using surface acoustic waves excited in lithium niobate.